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MKS RPS AX7695 Integrated Remote Plasma Source
The MKS RPS AX7695 is an Integrated Remote Plasma Source, which is a device used in semiconductor manufacturing to generate a clean and low-cost source of atomic radicals for wafer processing.
The AX7695 integrates a quartz vacuum chamber, RF power supply, and all necessary controls into a compact, self-contained unit for easy installation directly on the tool process chamber. This allows for a simpler and more cost-effective way to introduce atomic radicals into the process chamber compared to traditional methods.
Here are some of the key features of the MKS RPS AX7695:
- Integrated design: Combines all necessary components into a single unit for easy installation and operation.
- Clean source of atomic radicals: Produces a clean and low-contamination source of atomic radicals, which is essential for many semiconductor processes.
- Low cost: Provides a cost-effective way to introduce atomic radicals into the process chamber.
- High flow rates: Can deliver up to 6 slm of atomic radicals, which is sufficient for many applications.
- Compact size: The compact size of the AX7695 makes it ideal for use in a variety of tool chambers.
Our commitment:
100% Quality Assurance: We have a strict control system for product quality, from raw material procurement to production and processing, and then to finished product inspection, each step undergoes strict testing and monitoring to ensure that the product meets the highest quality standards.
Competitive pricing: We are committed to providing customers with the most cost-effective products. We reduce costs through large-scale production and lean management, and provide high-quality products at reasonable prices.
Fast delivery time: We have a comprehensive production and logistics system that can quickly respond to customer needs and ensure timely delivery.
Professional technical team: We have an experienced and skilled technical team that can provide you with comprehensive technical support and services.
Reply to your inquiry within 24 hours: We will be happy to serve you and respond to any inquiries within 24 hours.
